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ISSN 2063-5346
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Fabrication of MEMS/NEMS Cantilevers with different material coatings characterization using SEM and LDV

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Shankara Naik1 , Saroja Kubappa Rajaput2 , Harish H M3
» doi: 10.48047/ecb/2023.12.8.498

Abstract

In the present work, we have fabricated two different types of MEMS/NEMS Cantilevers and done characterization using SEM and LDV analysis for different design metrics. Identifying and recognizable proof of Nano cantilevers are working an imperative part works in the front line world, especially in the medicine, science, normal distinguishing applications, biomedical and in Nano equipment building. Examination and reaction of the cantilever is being shown in Nano cantilever by assembling it adaptable. Recently, investigation and disclosure of Nano cantilever properties using nano materials, analytes has experienced consideration taken and has transformed into a basic issue in the setup and production of Nano cantilevers.

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