Volume - 13 | Issue-1
Volume - 13 | Issue-1
Volume - 13 | Issue-1
Volume - 13 | Issue-1
Volume - 13 | Issue-1
In this work, a MEMS based capacitive switch is designed and analyzed for reduced pull-in voltage. The major flexures like cantilever and clamped-clamped structures are studied and it is found that serpentine spring produces lowest spring constant and therefore it is utilized in the design to make spring loaded proof mass. The designed switch consists of serpentine spring and proof mass to allow the displacement required for the electrostatic actuation. In the bottom of the proof-mass an air gap of five micrometer is kept a dielectric layer of thickness three micrometer is deposited and finally a metal layer of gold is deposited as a ground line. The material used for the proof mass is polysilicon. The variation in the Pull-in voltage is studied by changing dielectric layer thickness and with other dielectric materials also. The switch is simulated based on the FEM method to validate the design in terms of numerical simulations. The pull-in voltage and figure of merit is calculated theoretically and the compared with the simulated results. The simulation results ae in line with the analytical results.